Flat Panel Display
FDST Susceptor(FULL DEPO)
Heater Product■ Meterial : AL6061-T6
■ Product Size : 5G~11G
■ Max Temp : 480℃
■ Operating temp : 360℃±3%
■ Suface Coating
- Bare type
- oxalic acid Anodizing type
- mixed acid Anodizing type
■ Suface Roughness
- Nomal 5~12um
- High 15~20um
MDST Susceptor(온도균일향상)
Heater Product ■ Meterial : AL6061-T6
■ Product Size : 5G~11G
■ Max Temp : 480℃
■ Operating temp : 360℃±1%
■Suface Coating
- Bare type
- oxalic acid Anodizing type
- mixed acid Anodizing type
■ Suface Roughness
- Nomal 5~12um
- High 15~20um
FMST(MDST+FDST) Susceptor
Heater Product■ Material : AL6061-T6
■ Product Size : 5G~11G
■ Max Temp : 480℃
■ Operating Temp : 360℃±1%
■ Suface Coating
- Bare type
- oxalic acid Anodizing type
- mixed acid Anodizing type
■ Suface Roughness
- Nomal 5~12um
- High 15~20um
Normal Susceptor
Heater Product■ Meterial : AL6061-T6
■ Product Size : 1G~11G
■ Max Temp : 480℃
■ Operating Temp : 360℃±3%
■ Suface Coating
- Bare type
- oxalic acid Anodizing type
- mixed acid Anodizing type
■ Suface Roughness
- Nomal 5~12um
- High 15~20um